Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
Reactive-ion etching — (RIE) is an etching technology used in microfabrication. It uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High energy ions from the plasma… … Wikipedia
Ion beam — An ion beam is a type of particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. Today s ion beam sources are typically derived from the mercury vapor thrusters… … Wikipedia
Ionenätzkammer — joninio ėsdinimo kamera statusas T sritis radioelektronika atitikmenys: angl. ion etching chamber vok. Ionenätzkammer, f rus. камера для ионного травления, f pranc. chambre pour décapage ionique, f … Radioelektronikos terminų žodynas
chambre pour décapage ionique — joninio ėsdinimo kamera statusas T sritis radioelektronika atitikmenys: angl. ion etching chamber vok. Ionenätzkammer, f rus. камера для ионного травления, f pranc. chambre pour décapage ionique, f … Radioelektronikos terminų žodynas
joninio ėsdinimo kamera — statusas T sritis radioelektronika atitikmenys: angl. ion etching chamber vok. Ionenätzkammer, f rus. камера для ионного травления, f pranc. chambre pour décapage ionique, f … Radioelektronikos terminų žodynas
камера для ионного травления — joninio ėsdinimo kamera statusas T sritis radioelektronika atitikmenys: angl. ion etching chamber vok. Ionenätzkammer, f rus. камера для ионного травления, f pranc. chambre pour décapage ionique, f … Radioelektronikos terminų žodynas
Sputtering — is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. It is commonly used for thin film deposition, etching and analytical techniques (see below). Physics of sputtering Physical… … Wikipedia
Transmission electron microscopy — A TEM image of the polio virus. The polio virus is 30 nm in size.[1] Transmission electron microscopy (TEM) is a microscopy technique whereby a beam of electrons is transmitted through an ultra thin specimen, interacting with the specimen as it… … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
integrated circuit — Electronics. a circuit of transistors, resistors, and capacitors constructed on a single semiconductor wafer or chip, in which the components are interconnected to perform a given function. Abbr.: IC Also called microcircuit. [1955 60] * * * ▪… … Universalium
